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Microelectromechanical systems
Microfabrication Breakthrough Could Set Piezoelectric Material Applications in Motion
Precision-Controlled Microbots Show They Could Take On Industrial-Scale Jobs
Chemical-etching technique could lead to diamond micro-machines
MIT researchers build a bridge to better energy harvesting MEMS device
Micromachines for a Safer World
Researchers show off tiny piezoelectric energy capture sensor
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